Method of Fabricating Photoelectronic Device of Group III Nitride Semiconductor and Structure Thereof

ABSTRACT

A method of fabricating a photoelectric device of Group III nitride semiconductor comprises the steps of: forming a first Group III nitride semiconductor layer on a surface of an original substrate; forming a patterned epitaxial-blocking layer on the first Group III nitride semiconductor layer; forming a second Group III nitride semiconductor layer on the epitaxial-blocking layer and the first Group III nitride semiconductor layer not covered by the epitaxial-blocking layer and then removing the epitaxial-blocking layer; forming a third Group III nitride semiconductor layer on the second Group III nitride semiconductor layer; depositing or adhering a conductive layer on the third Group III nitride semiconductor layer; and releasing a combination of the third Group III nitride semiconductor layer and the conductive layer apart from the second Group III nitride semiconductor layer.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of prior-filed U.S. patentapplication Ser. No. 12/426,010 field Apr. 17, 2009, which is based onand claims priority from R.O.C. Patent Application No. 097115512 filedApr. 28, 2008.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to the structure and fabricating method ofa photoelectric device of Group III nitride semiconductor, and relatesmore particularly to the light emitting structure of a photoelectricdevice and the fabricating method thereof.

2. Description of the Related Art

Currently, light emitting diodes made of gallium nitride material orGroup III nitride semiconductor material are built upon a sapphiresubstrate mainly because the degree of lattice mismatch between sapphireand Group III nitride semiconductor material is low (although a bufferlayer is still often required to improve the mismatch therebetween).However, sapphire substrates have many disadvantages, such as highinsulation characteristics, and due to such characteristics it is noteasy to create a light emitting diode made of Group III nitridesemiconductor material having a vertical conductive structure.Therefore, technology continues to advance and allow use of othersubstrate materials, such as silicon carbide, to reduce suchdisadvantages. Due to its greater conductivity, silicon carbide can beused to produce a conductive substrate, and because the degree oflattice match between silicon carbide and Group III nitride active layeris low, using a buffer layer made of gallium nitride or aluminum galliumnitride, a Group III nitride semiconductor layer can be deposited on asilicon carbide substrate. Moreover, due to its high stability, siliconcarbide is becoming more important in such manufacturing processes.Although a Group III nitride semiconductor layer can be deposited on asilicon carbide substrate with the help of a buffer layer made ofgallium nitride or aluminum gallium nitride, the degree of lattice matchbetween a Group III nitride semiconductor material and silicon carbide(which is lower than the degree of lattice match between aluminumgallium nitride and silicon carbide) often causes defects in anexpitaxial layer even where the buffer layer is formed on a siliconcarbide substrate. Furthermore, a silicon carbide substrate is moreexpensive than substrates made of other materials.

FIGS. 1A and 1B show a method of separating a thin film from a growthsubstrate, disclosed in U.S. Pat. No. 6,071,795. The method initially isforms a separation region 12 and a silicon nitride layer 13 on asapphire substrate 11, and then a bonding layer 14 is disposed on thesurface of the silicon nitride layer 13. Next, with the help of thebonding layer 14, a silicon substrate 15 is bonded to theabove-mentioned sapphire substrate 11 with a stacked-layer structure. Alaser beam penetrating the sapphire substrate 11 is directed at theseparation region 12, and causes the separation region to decompose.Finally, the remnant material of the decomposed separation region 12 iscleared to obtain a composite including the silicon substrate 15 and thesilicon nitride layer 13. However, because the bonding layer 14 betweenthe silicon substrate 15 and the silicon nitride layer 13 is dielectric,the composite cannot be a basis for building a vertical structure lightemitting diode. Moreover, if the material for the bonding layer 14 isdisposed incorrectly or selected improperly, the bonding is affected,and defects are formed in the silicon nitride layer 13.

FIG. 2 shows a method of separating two layers of material from oneanother, disclosed in U.S. Pat. No. 6,740,604. The technology used forthe disclosure related to FIG. 2 is similar to the technology for thedisclosure related to FIGS. 1A and 1B. A laser beam 23 is directed atthe interface between a first semiconductor layer 21 and a secondsemiconductor layer 22, and initiates the decomposition of the secondsemiconductor layer 22 at the interface. Finally, the firstsemiconductor layer 21 is separated from the second semiconductor layer22. The second semiconductor layer 22 can be the film layer formed on asubstrate. In such process, a substrate replaces the first semiconductorlayer 21, and then both are separated.

FIG. 3 shows a structure prior to separation of the substrate, disclosedin U.S. Pat. No. 6,746,889. The method initially grows several epitaxiallayers, which comprise the first region 32 of a first conductivity type,a light-emitting p-n junction 33, and the second region 34 of a secondconductivity type, on a substrate 31. Next, several sawing streets 36are cut through the epitaxial layers of the first region 32,light-emitting p-n junction 33 and second region 34 to have a pluralityof individual optoelectronic is devices or dies 35 formed on thesubstrate 31. Thereafter, the second region 34 is bonded to a submount37. As shown in the above-mentioned prior art technology, a laser beam,in the same manner, penetrating the substrate 31 causes the substrate 31to separate from the first region 32. Separated optoelectronic devicesor dies 35 can be removed from the submount 37 and proceed through thepackaging processes. Obviously, when the epitaxial layers are cutthrough, individual optoelectronic devices or dies 35 bonded to thesubmount 37 squeeze one another by external forces such that die cracksmay occur.

FIG. 4 is a side view of the laser lift-off process for removing asapphire substrate, disclosed in U.S. Pat. No. 6,617,261. A galliumnitride layer 42 is initially formed on a sapphire substrate 41, andthen a plurality of grooves 44 are formed by etching process. Next, asilicon substrate 43 is bonded to the surface where the gallium nitridelayer 42 is formed and then is etched to form the grooves 44.Thereafter, an ultraviolet excimer laser 45 emits a laser beam 46 to thesapphire substrate 41. The laser beam 46 penetrates the transparentsapphire substrate 41 to cause the gallium nitride at the interface todecompose so as to obtain a silicon substrate 43 bonded with the galliumnitride layer 42. Any residual gallium metal on the surface of thegallium nitride layer 42 is removed by hydrochloric acid. The galliumnitride layer 42 is finally cleaned for subsequent deposition processes.

Conventional technologies use high-energy laser beams to separatesubstrates or light emitting dies. However, those technologies have lowthroughput and require expensive equipment. Therefore, a new separationtechnology that has none of the above-mentioned issues, can guaranteethe quality of produced light emitting dies, and can be applied to massproduction is required by the market.

SUMMARY OF THE INVENTION

The primary objective of the present invention is to provide aphotoelectric device of Group III nitride semiconductor and afabricating is method thereof. The method can employ an insulatingoriginal substrate as a base for epitaxy, which is then removed toobtain a photoelectric device of Group III nitride semiconductor havinga vertical conductive structure.

Another objective of the present invention is to provide a photoelectricdevice of Group III nitride semiconductor and the fabricating methodthereof using conventional processes and equipment so as to minimizemanufacturing cost.

In order to achieve the above objectives, the present invention proposesa method of fabricating a photoelectric device of Group III nitridesemiconductor, with the method comprising the steps of: forming a firstGroup III nitride semiconductor layer on a surface of an originalsubstrate; forming a patterned epitaxial-blocking layer on the firstGroup III nitride semiconductor layer; forming a second Group IIInitride semiconductor layer on the epitaxial-blocking layer and on theportions of the first Group III nitride semiconductor layer not coveredby the epitaxial-blocking layer, and then removing theepitaxial-blocking layer; forming a third Group III nitridesemiconductor layer on the second Group III nitride semiconductor layer;depositing or adhering a conductive layer on the third Group III nitridesemiconductor layer; and releasing a combination of the third Group IIInitride semiconductor layer and the conductive layer apart from thesecond Group III nitride semiconductor layer.

According to one embodiment, the method of fabricating a photoelectricdevice of Group III nitride semiconductor further comprises a step offorming a metallic mirror layer between the third Group III nitridesemiconductor layer and the conductive layer.

The material of the epitaxial-blocking layer is preferably silica.

According to one embodiment, the conductive layer is formed byelectroplating, composite electroplating, or bonding to deposit copper(Cu), nickel (Ni), copper tungsten alloy (CuW), silicon (Si), or siliconcarbide (SiC).

According to one embodiment, the material of the original substratecomprises sapphire, silicon carbide, silicon, zinc oxide, magnesiumoxide, and gallium arsenide.

According to one embodiment, the second Group III nitride semiconductorlayer is decomposed by wet etching so that the combination of the thirdGroup III nitride semiconductor layer and the conductive layer isseparated from the original substrate.

According to one embodiment, the method further comprises a step offorming an N-type semiconductor layer, an active layer, and a P-typesemiconductor layer between the third Group III nitride semiconductorlayer and the metallic mirror layer.

According to one embodiment, the epitaxial-blocking layer comprises aplurality of convexes and a plurality of grooves among the convexes.

According to one embodiment, the method of fabricating a photoelectricdevice of Group III nitride semiconductor further comprises a step ofdisposing an etching protection layer on the conductive layer and themetallic mirror layer.

According to one embodiment, the second Group III nitride semiconductorlayer comprises a plurality of mushroom blocks or mushroom stripsprotruding on the first Group III nitride semiconductor layer. The thirdGroup III nitride semiconductor layer is laterally grown from the sidesof each of the mushroom blocks or the mushroom strips to join eachother. The profile of each of the mushroom blocks or the mushroom stripscan be changed by controlling the growth conditions of the third GroupIII nitride semiconductor layer.

The present invention proposes a photoelectric device of Group IIInitride semiconductor, which comprises a Group III nitride semiconductorlayer, a metallic mirror layer formed on the Group III nitridesemiconductor is layer; and a conductive layer formed on the metallicmirror layer.

According to one embodiment, the material of the Group III nitridesemiconductor layer is Al_(x)In_(y)Ga_(1-x-y)N, wherein 0≦x≦1 and 0≦y≦1.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described according to the appended drawings inwhich:

FIGS. 1A and 1B show a method of separating a thin film from a growthsubstrate, disclosed in U.S. Pat. No. 6,071,795;

FIG. 2 shows a method of separating two layers of material from oneanother, disclosed in U.S. Pat. No. 6,740,604;

FIG. 3 shows a structure before a substrate is separated, disclosed inU.S. Pat. No. 6,746,889;

FIG. 4 is a side view of the laser lift-off process for removing asapphire substrate, disclosed in U.S. Pat. No. 6,617,261;

FIG. 5 is a flow chart showing a process for fabricating a photoelectricdevice of Group III nitride semiconductor according to one embodiment ofthe present invention;

FIGS. 6A-6G are schematic diagrams illustrating a process forfabricating a photoelectric device of Group III nitride semiconductoraccording to one embodiment of the present invention;

FIGS. 7A and 7B are schematic diagrams illustrating a process forfabricating a photoelectric device of Group III nitride semiconductoraccording to another embodiment of the present invention; and

FIGS. 8A-8D are schematic diagrams illustrating patterned first GroupIII nitride semiconductor layers according to embodiments of the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION

is FIG. 5 is a flow chart showing a process for fabricating aphotoelectric device of Group III nitride semiconductor according to oneembodiment of the present invention. In Step S51, a first Group IIInitride semiconductor layer is formed on a surface of a originalsubstrate, such as a sapphire substrate (i.e. aluminum oxide, Al₂O₃),silicon carbide (SiC) substrate, silicon substrate, zinc oxide (ZnO)substrate, magnesium oxide (MgO) substrate, gallium arsenide (GaAs)substrate, etc. Then, in Step S52, using photolithography and etchingprocess to form a patterned epitaxial-blocking layer on the first GroupIII nitride semiconductor layer. For example a patterned silicon oxide.That is, the epitaxial-blocking layer with a default pattern coverspartial surfaces of the first Group III nitride semiconductor layer.

Subsequently, a second Group III nitride semiconductor layer is grown onthe epitaxial-blocking layer and the exposed portions of the first GroupIII nitride semiconductor layer, as shown in Step S53. Before the secondGroup III nitride semiconductor layer completely covers theepitaxial-blocking layer, the growth of the second Group III nitridesemiconductor layer is stopped. Then, the epitaxial-blocking layer isremoved, as shown in Step S54 and S55.

In Step S56, a third Group III nitride semiconductor layer is grown onthe second Group III nitride semiconductor layer. Next, a metallicmirror layer is formed on the third Group III nitride semiconductorlayer, as shown in Step S57. The metallic mirror layer can reflect thelight emitted from the third Group III nitride semiconductor layer. Asshown in Step S58, a conductive material is deposited on the third GroupIII nitride semiconductor layer. For example, the conductive layer isformed by electroplating, composite electroplating, or bonding todeposit copper (Cu), nickel (Ni), copper tungsten alloy (CuW), silicon(Si), or silicon carbide (SiC) so that the light emitting diode has avertical conductive structure. A is photoelectric device of Group IIInitride semiconductor with a single vertical conductive structure isobtained by releasing the combination of the third Group III nitridesemiconductor layer and the conductive layer apart from the second GroupIII nitride semiconductor layer, as shown in Step S59. The second GroupIII nitride semiconductor layer can be decomposed by an etching step.

FIGS. 6A-6G are schematic diagrams illustrating a process forfabricating a photoelectric device of Group III nitride semiconductoraccording to one embodiment of the present invention. A first Group IIInitride semiconductor layer 62 is formed on the surface of an originalsubstrate 61. A patterned epitaxial-blocking layer 63 is formed on thefirst Group III nitride semiconductor layer 62. A second Group IIInitride semiconductor layer 64 is formed on the epitaxial-blocking layer63 and the surface of the first Group III nitride semiconductor layer 62not covered by the epitaxial-blocking layer 63, as shown in FIG. 6C. Thesecond Group III nitride semiconductor layer 64 is laterally overgrownon the portion of the surface of the first Group III nitridesemiconductor layer 62 where the epitaxial-blocking layer 63 does notcover from the middle of each of the openings. Therefore, the defects ofthreading dislocation are reduced. Furthermore, the direction of athreading dislocation defect occurring in the second Group III nitridesemiconductor layer 64 located in the opening is redirected to extend inparallel manner along the surface of the original substrate 61. Thisthreading dislocation defect will meet another defect propagating in anopposite direction so that the density of vertical threading dislocationis reduced.

As shown in FIG. 6D, the epitaxial-blocking layer 63 is removed by anetching process, and grooves 63′ appear. Consequently, themushroom-blocks or mushroom-strips of the second Group III nitridesemiconductor layer 64 are erected on the first Group III nitridesemiconductor layer 62. Afterward, a third Group III nitridesemiconductor layer 65 is formed on the mushroom-blocks ormushroom-strips of the second Group III nitride is semiconductor layer64. The third Group III nitride semiconductor layer 65 is laterallygrown from the sides of each of the mushroom members of the second GroupIII nitride semiconductor layer 64 until the separate segments from eachmushroom member join together into one layer. As shown in FIG. 6E, ametallic mirror layer 66 is formed on the third Group III nitridesemiconductor layer 65.

A conductive layer 67 is deposited on or adhered to the metallic mirrorlayer 66. For example, copper (Cu), nickel (Ni), copper tungsten alloy(CuW), silicon (Si), or silicon carbide (SiC) is deposited thereon byelectroplating, composite electroplating, or bonding. In addition toexcellent electrical conductivity, the conductive layer 66 can alsoimprove heat conductivity. Depositing an etching protection layer 68,for example a silicon dioxide (SiO₂) layer, to protect the conductivelayer 67 and the mirror metal layer 66 from the corrosion of theetchant. Under the protection of the etching protection layer 68, theconductive layer 67 and the mirror metal layer 66 will not be exposed tothe etchant so as to avoid damage. Consequently, the etchant is broughtinto the grooves 63′ of the second Group III nitride semiconductor layer64 so that the second Group III nitride semiconductor layer 64 and partsof the third Group III nitride semiconductor layer 65 are decomposed.The combination of the treated third Group III nitride semiconductorlayer 65′ and the layers stacked on the layer 65′ is released from thesecond Group III nitride semiconductor layer 62. Next, the etchingprotection layer 68 is removed so as to obtain a photoelectric device 60of Group III nitride semiconductor, as shown in FIG. 6G.

The metallic mirror layer 66 is selectable, and depends on the packagetype of the photoelectric device for reflecting light. The material ofthe second Group III nitride semiconductor layer 64 and the third GroupIII nitride semiconductor layer 65 is Al_(x)In_(y)Ga_(1-x-y)N, wherein0≦x≦1 and 0≦y≦1, and such material helps the deposition of the silicondoped N-type gallium nitride layer. The third Group III nitridesemiconductor layer 65 is can include a light emitting structure, andspecifically can include an N-type semiconductor layer, an active layer(light emitting layer), and a P-type semiconductor layer, or a lightemitting structure can be further formed between the third Group IIInitride semiconductor layer 65 and the metallic mirror layer 66.

The profile of each of the mushroom blocks or the mushroom strips can bechanged by controlling growth conditions of the second Group III nitridesemiconductor layer 64 such as the flow rate of the elements of GroupIII nitride, temperature and time. Compared with FIG. 6C, the secondGroup III nitride semiconductor layer 64′ in FIG. 7A has flat topsrather than sharp tops. Similarly, after the epitaxial-blocking layer 63is removed, the third Group III nitride semiconductor layer 65, metallicmirror layer 66 and etching protection layer 68 are sequentially formed,as shown in FIG. 7B. The combination of the treated third Group IIInitride semiconductor layer 65 and the layers stacked on the layer 65 isreleased from the second Group III nitride semiconductor layer 62 byusing wet etching technology. Furthermore, the etching protection layer68 is removed so as to obtain a vertical photoelectric device of GroupIII nitride semiconductor.

FIGS. 8A-8D are schematic diagrams illustrating patterned first GroupIII nitride semiconductor layers according to embodiments of the presentinvention. As shown in FIG. 8A, the epitaxial-blocking layer 63 has aplurality of hexagonal cylinders 631 and a plurality of grooves 632connected together. As shown in FIG. 8B, the epitaxial-blocking layer 63has a plurality of circular cylinders 633 and a plurality of grooves 634connected together. As shown in FIG. 8C, the epitaxial-blocking layer 63has a plurality of rectangular cylinders 635 and a plurality of grooves636 connected together. As shown in FIG. 8D, the epitaxial-blockinglayer 63 has a plurality of convexes 637 and a plurality of grooves 628separating the convexes 627, and the convex 627 can have a strip-likeshape.

The above-described embodiments of the present invention are intended tobe illustrative only. Numerous alternative embodiments may be is devisedby persons skilled in the art without departing from the scope of thefollowing claims.

1. A photoelectric device of Group III nitride semiconductor,comprising: a patterned Group III nitride semiconductor layer; ametallic mirror layer formed on said Group III nitride semiconductorlayer; and a conductive layer on said metallic mirror layer.
 2. Thephotoelectric device of Group III nitride semiconductor of claim 1,wherein the material of the Group III nitride semiconductor layer isAl_(x)In_(y)Ga_(1-x-y)N, wherein 0≦x≦1 and 0≦y≦1.
 3. The photoelectricdevice of Group III nitride semiconductor of claim 1, wherein theconductive layer is formed by electroplating, composite electroplating,or bonding depositing copper (Cu), nickel (Ni), copper tungsten alloy(CuW), silicon (Si), or silicon carbide (SiC).
 4. The photoelectricdevice of Group III nitride semiconductor of claim 1, further comprisingan N-type semiconductor layer, an active layer, and a P-typesemiconductor layer formed between the Group III nitride semiconductorlayer and the metallic mirror layer.
 5. The photoelectric device ofGroup III nitride semiconductor of claim 1, wherein the Group IIInitride semiconductor layer comprises an N-type semiconductor layer, anactive layer, and a P-type semiconductor layer.